Product introduction

Permalloy sheet metal shields are magnetic shielding structural components manufactured from high-permeability Permalloy sheets through laser cutting, CNC stamping, precision bending, welding, and other sheet metal forming processes. They combine excellent low-frequency magnetic shielding capability with the structural flexibility of sheet metal fabrication. Our products are available in two material series: 80% Nickel (typical grades 1J79/1J85) and 48~50% Nickel (typical grades 1J50), in common thicknesses including 1.0mm, 1.5mm, 2.0mm, and 3.0mm, with custom designs available upon request. They are suitable for vacuum chamber shielding liners, precision transfer component shielding brackets, and lithography high-voltage power supply shielding structures in semiconductor manufacturing equipment.

KEY FEATURES:

• High initial permeability (especially for 80% Ni), offering excellent absorption and bypass capability for low-frequency stray magnetic fields in semiconductor equipment, effectively attenuating low-frequency radiation from power supplies, with shielding effectiveness enhanced to over 40dB when combined with a high-conductivity outer layer;

• Low coercivity and low hysteresis loss, enabling rapid response to magnetization and demagnetization, suitable for alternating magnetic field environments, reducing temperature rise and energy loss;

• Near-zero magnetostriction for high-nickel (80% Ni) material, ensuring minimal dimensional change during magnetization, suitable for precision assembly and high-stability semiconductor equipment applications;

• Excellent sheet metal forming plasticity, supporting laser cutting, CNC stamping, bending, deep drawing, welding, and other forming processes for complex shielding enclosures and structural brackets;

• Hydrogen annealing eliminates processing stresses and restores optimum magnetic properties, ensuring stable and reliable shielding effectiveness;

• High dimensional accuracy with custom designs available upon request, meeting mass production and precision assembly requirements for semiconductor equipment.

TYPICAL APPLICATIONS:

• Inner shielding layer for lithography high-voltage power supplies, utilizing Permalloy’s low-frequency magnetic shielding capability to attenuate internal low-frequency radiation, forming a composite shielding system with a high-conductivity outer layer to ensure lithography accuracy;

• Shielding support brackets inside vacuum chambers of ion implanters and wafer inspection equipment, combining magnetic shielding with structural positioning to prevent external magnetic fields from interfering with ion beams or detection signals;

• Magnetic shielding structural components for precision transfer parts in semiconductor manufacturing equipment, for local magnetic protection of wafer transfer robot arms and precision positioning mechanisms;

• Internal shielding components for high-precision electron beam lithography chambers, providing a magnetic-interference-free environment for electron beam paths to ensure exposure accuracy;

• Magnetic shielding enclosures for sensitive electronic modules in semiconductor equipment, protecting internal sensors and signal processing circuits from stray magnetic fields generated by the equipment itself and the environment.

Product type

Sheet Metal Fabricated Parts

Product specification model

We offer flexible non-standard customization based on your 2D/3D drawings, including overall dimensions, sheet thickness, irregular cutouts, mounting hole layouts, bending angles, and surface finish options, fully meeting the diverse needs of clients across various industries for precision sheet metal components.